Alumina Ceramic
KCM Technology
Ceramic for Display
Display
ICP etching equipment that precisely shaves unnecessary parts among metals and semiconductors deposited on a thin film transistor (TFT) board is needed to produce displays.
TFT that operates individual pixel of LCD and OLED panels is made through a same photolithography process as semiconductors. TFT has a much easier manufacturing process than DRAM or NAND, but has a large board.
Alumina ceramic is used as parts for dielectric window, shield plates, ESC, and others.
Long body : 4000x500x40t / Wide body : 2000x1200x50t
Enlargement of Display
As the size of display boards becomes 10.5 generation from 8generation globally, the demand for protonic ceramic materials has increased.
The 10.5 generation ICP etching equipment needs a very big ceramic material for dielectric windows, etc. It also needs shield plates and ESC in the form of long body and wide body to maintain plasma uniformity around a glass board, protect equipment, and stably affix a glass board.
At this time, a long body type product is used as both a ceramic part that processes left and right edges like the end effector of a glass board and dry etcher equipment. A wide body type product is used as dielectric ceramic inside dry etcher equipment and for ESC basic material.
Our company has developed technology for mass production of many ceramic products and obtained a related patent (No. 10- 2023972, Method for manufacturing large sized ceramics sintered body.
