Alumina Ceramic

KCM Technology

KCM Product 01

体ݻ

体ݻ

体ѦCVDALDѫëDry Etchʪɪ装Ǫϡ温圧Ѫ窱몿 ᡢー内ݻϰݻұڪܪͣުȫー内ݻŪݻ ϡ温ݯݡ学Ī対ұުȪЪ쪿߫ëªƪު

Alumina߫ëϡұұؤұ׫髺気縁Ъ졢ー体ު몿Ϋϫ ȪĪ졢Ϫ檹Arm߾ݻп(ǫիーー)ݻп( ׫ )ȫー内 ΫիȫëΪ誦ݻȪƪĪު

99.99% Al2O3߫ë

体ߧ続ܪ˪ꡢпڪ( /温)ѪѢܪʦ体 ・ݻΫ߫ë驪ͣܪ増 ƪު

99.99% Al2O3 ߫ëϡұ׫髺 強ұުȪЪƪꡢ 対応ʦʪᡢ体装 ݻĪ Īƪꡢߧ広応 Īު(ESCٽ, Microwave induc- tion parts, Chamber parts, Insulating parts)

99.8% Al2O3߫ë

99.8%߾ Al2O3 ߫ëϡ 属׫髹ëʪɪ٪学 Ԫêƪꡢ˪Ԫұ ؤ󪷪ƪުު温Ǫ気 縁1,600〜1,700C˪ұұ 󪷪ƪު˪ꡢ温 真 髺Ѫϴ뫨ë装 ʪ ĪݻȪŪ ƪު

DELECIRC WINDOW体装ΪDry Etcherݻǡ߾Ϊ誦Etcher ChamberCoverȪĪު
DIELECTRIC WINDOW߾ݻ˪ϫիͧݯPlassma몿CoiǪƪꡢݻ強ʫիͧPlassma󪷪ƪ˪(Erosion)発檷ު

Particle˪ӡDIELECTRIC WINDOWުΪұ׫髺ޫーƫ󫰪ƪު

BASE CATHODE INSULATOR DPS MEC 99.8%
AI203 ߫ë/ DRY ETCHER

ULTIMA HDP CERAMIC DOME / CVD

CERAMIC WAFER LOADER ARM

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